Substrate transfer system and substrate positioning device
US8939275B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 19, 2012 |
| Grant date | Jan 27, 2015 |
| Priority date | — |
| Expiry date | Mar 14, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The present invention relates to a substrate transfer system, comprising a number of roller assemblies used for mobile transfer of the glass substrate on it, and a controller used for controlling rotation of the roller assemblies; the substrate transfer system further comprises a substrate positioning device, which is arranged at the end of the transfer direction of the glass substrate by the roller assemblies; the substrate positioning device comprises a positioning pole, which is used for blocking and positioning the glass substrate transferred by the roller assemblies; and a buffer positioning mechanism on which the positioning pole is mounted on, providing mobile buffer for the positioning pole and driving the positioning pole to reset. A buffer reset mechanism is arranged for controlling the position of the positioning pole, and the positioning deviation of the substrate can be further eliminated; it can provide buffer contact for eliminating the risk of fragmentation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.