Patent · US Active

Lens module comprising at least one exchangeable optical element

US8939587B2 · kind B2 · utility

0Cited by

3References

36Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Guido Soyez · Ludwigsburg, DE
Stephan Back · Langenau, DE
Joachim Buechele · Lauchheim, DE
Julian Kaller · Oberkochen, DE
Guido Limbach · Aalen, DE
Harald Woelfle · Waldkirch, DE

Key dates

Filing date	Feb 13, 2013
Grant date	Jan 27, 2015
Priority date	—
Expiry date	Feb 13, 2033

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70933
WIPO fieldOptics
WIPO sectorInstruments

Abstract

An optical system has a housing with a mount and an opening to a receiving region, the receiving region being located within the housing and including the mount. At least one optical element is inserted into and removed from the receiving region through the opening, and at least one gas supply device provides a flow of gas in the receiving region. Alternatively or in addition, the optical system has a gas lock that receives the optical element. The opening interconnects the gas lock and the receiving region of the housing, and accommodates passage of the optical element between the gas lock and the receiving region.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.