Thin film application device and method for coating small aperture vacuum vessels
US8940140B2 · kind B2 · utility
0Cited by
8References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 5, 2007 |
| Grant date | Jan 27, 2015 |
| Priority date | — |
| Expiry date | Apr 28, 2032 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/345
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A device and method for coating an inside surface of a vessel is provided. In one embodiment, a coating device comprises a power supply and a diode in electrical communication with the power supply, wherein electrodes comprising the diode reside completely within the vessel. The method comprises reversibly sealing electrodes in a vessel, sputtering elemental metal or metal compound on the surface while maintaining the surface in a controlled atmosphere.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.