Patent · US Active

Method of producing a microacoustic component

US8940359B2 · kind B2 · utility

1Cited by

4References

18Claims

0Family size

Assignee

EPCOS AG · DE

Inventors

Christoph Eggs · Rattenkirchen, DE
Gudrun Henn · Ebenhausen, DE
Werner Ruile · Birkenfeld, DE
Guenter Scheinbacher · Baldham, DE
Siegfried Menzel · Dresden, DE
Mario Spindler · Dresden, DE

Key dates

Filing date	Sep 1, 2011
Grant date	Jan 27, 2015
Priority date	—
Expiry date	Sep 23, 2031

Classification

Technology area (CPC H)Electricity
CPC primaryH10N30/076
WIPO fieldBasic communication processes
WIPO sectorElectrical engineering

Abstract

The microacoustic component has a substrate that has at least one layer (composed of a dielectric or piezoelectric material, and a metallic strip structure. The layer is composed of a dielectric or piezoelectric material and/or the metallic strip structure have/has been produced or can be produced by the atomic layer deposition method.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.