Electromechanical microsystems with air gaps
US8941452B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Aug 11, 2011 |
| Grant date | Jan 27, 2015 |
| Priority date | — |
| Expiry date | Aug 11, 2031 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B3/0008
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
The present invention relates to an microelectromechanical system (1) comprising: a base (15) comprising a substrate (20) and a substrate electrode (40); a moveable beam (30); a voltage generator (10) able to generate a potential difference between the beam (30) and the substrate electrode (40); and at least one mechanical stop (70) connected to the beam and designed to make contact with the base (15) when a potential difference is applied between the beam (30) and the substrate electrode (40), thereby defining an air-filled cavity (80) between the beam (30) and the substrate electrode (40), characterized in that it furthermore comprises an electrical-charge blocking element (50) placed on the substrate (20), said element facing the at least one mechanical stop (70) and being electrically connected to the beam (30).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.