Capacitive pressure sensor
US8943895B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 7, 2012 |
| Grant date | Feb 3, 2015 |
| Priority date | — |
| Expiry date | Jun 11, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L19/04
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Pressure sensors and their methods of use are described. In one embodiment, a pressure sensor includes a pressure deflectable diaphragm end formed of a first material with a first coefficient of thermal expansion, and a relatively non-deformable component formed of a second material having a second coefficient of thermal expansion. The pressure deflectable diaphragm end and the non-deformable component form a first and a second portion of a capacitor. An intermediate component separates, or is disposed between, the pressure deflectable diaphragm end and the relatively non-deformable component. The intermediate component is formed of a material with a coefficient of thermal expansion that is less than the first coefficient of thermal expansion which may help minimize changes in span with temperature. In other embodiments, a pressure sensor includes an intermediate circuit located between a distal end of the pressure sensor and a remotely located circuit enclosure including a main circuit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.