Flow sensors having a flow duct in the cover, and sensor tip as intermediate product

US8943913B2 · kind B2 · utility

Assignee

• Heraeus Sensor Technology GmbH · DE

Inventors

• Matthias Muziol · Seligenstadt, DE
• Karlheinz Wienand · Aschaffenburg, DE

Key dates

• Filing date: Jan 24, 2012
• Grant date: Feb 3, 2015
• Expiry date: Apr 16, 2033

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T29/49124
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

For mass production of anemometers for EGR systems with hot exhaust gas streams having temperatures up to 200° C. or 300° C., conductors and film resistors are placed onto a bed, and are covered on this bed, e.g. A sensor tip of the flow sensor of the anemometer is made of inorganic materials up to the housing cover. A cable is led into a housing and self-supporting electrical conductors are led through the housing cover. In the housing, leads of the cable are connected to the self-supporting electrical conductors. Using bed profiles passing through the cover, the film resistors are spaced from the housing sufficiently far that the film resistors and the housing are largely thermally decoupled. As an intermediate product, a measurement tip or a sensor bar as part of a sensor tip is made of purely inorganic components, in order to make the mass production efficient.