Method for shaping and slicing ingots using an aqueous phosphate solution
US8945316B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Nov 18, 2011 |
| Grant date | Feb 3, 2015 |
| Priority date | — |
| Expiry date | Apr 24, 2032 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC11D2111/46
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method for slicing a workpiece into wafers in which a polyphosphate solution is applied to the workpiece during the slicing process. The method comprises the steps of positioning the workpiece, such as a silicon ingot, in the vicinity of a wire saw that can cut through the workpiece without the use of an abrasive slurry; causing an aqueous polyphosphate solution to contact the workpiece; and causing the wire saw to cut into the workpiece while the polyphosphate solution is in contact with the workpiece. After the workpiece has been cut into wafers, the polyphosphate solution is rinsed off of the wafers. Preferably, the wire saw used in this method is a diamond wire saw.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.