Miniature MEMS actuator assemblies

US8947797B2 · kind B2 · utility

Assignee

• DigitalOptics Corporation MEMS · US

Inventors

• Robert J. Calvet · Pasadena, US
• Guiqin Wang · Arcadia, US
• Roman C. Gutierrez · Arcadia, US
• Xiaolei Liu · Los Angeles, US

Key dates

• Filing date: Mar 15, 2013
• Grant date: Feb 3, 2015
• Expiry date: Mar 15, 2033

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T29/49826
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

In one embodiment, an electrostatic actuator includes a generally planar fixed frame, a generally planar moving frame coupled to the fixed frame by a flexure for substantially coplanar, perpendicular movement relative to the fixed frame, a plurality of interdigitated teeth, a fixed portion of which is attached to the fixed frame and a moving portion of which is attached to the moving frame, and an elongated output shaft having opposite input and output ends, the input end being coupled to the moving frame.