Apparatus with internal optical reference
US8950078B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Aug 6, 2013 |
| Grant date | Feb 10, 2015 |
| Priority date | — |
| Expiry date | Aug 6, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B21/042
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus for inspecting a measurement object, comprising a workpiece support for supporting the measurement object and a measuring head carrying an optical sensor. The measuring head and the workpiece support are movable relative to one another. The optical sensor has an objective and a camera designed to capture an image of the measurement object. The objective has a light entrance opening and a light exit opening, and comprises a multitude of lens-element groups arranged in the objective between the light entrance opening and the light exit opening one behind another along a longitudinal axis of the objective. Furthermore, the apparatus has a reflection element and a calibration arrangement. The reflection element can selectively be introduced into a beam path running from the measurement object through the objective to the camera. The calibration arrangement is coupled into the beam path to the camera by means of the reflection element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.