Patent · US Active

Micromechanical angular acceleration sensor and method for measuring an angular acceleration

US8950258B2 · kind B2 · utility

0Cited by

13References

19Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Reinhard Neul · Stuttgart, DE
Torsten Ohms · Lambach, DE
Mirko Hattass · Stuttgart, DE
Daniel Christoph Meisel · Pittsburgh, US

Key dates

Filing date	May 24, 2012
Grant date	Feb 10, 2015
Priority date	—
Expiry date	Mar 13, 2033

Classification

Technology area (CPC H)Electricity
CPC primaryH10N30/302
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A micromechanical angular acceleration sensor for measuring an angular acceleration is disclosed. The sensor includes a substrate, a seismic mass, at least one suspension, which fixes the seismic mass to the substrate in a deflectable manner, and at least one piezoresistive and/or piezoelectric element for measuring the angular acceleration. The piezoresistive and/or piezoelectric element is arranged in a cutout of the seismic mass. A corresponding method and uses of the sensor are also disclosed.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.