Thermal diffusion chamber control device and method

US8950470B2 · kind B2 · utility

Assignee

• POOLE VENTURA, INC. · US

Inventors

• Mark R. Erickson · Oxnard, US
• Aaron L. Dingus · Moorpark, US
• Arthur W. Custer, III · Ventura, US
• Henry J. Poole · Ventura, US
• Nader Jamshidi · Newbury Park, US

Key dates

• Filing date: Dec 30, 2010
• Grant date: Feb 10, 2015
• Expiry date: Dec 12, 2033

Classification

• Technology area (CPC F): Mechanical Engineering; Lighting; Heating
• CPC primary: F28F1/32
• WIPO field: Control
• WIPO sector: Instruments

Abstract

Preferably, obtaining internal and external thermal measurement values of a sealed process chamber allows a control system to generate a control signal based on a comparison of the internal and external thermal measurement values to the predetermined value. The control signal is provided to a fluid handling system, wherein the fluid handling system modulates flow of a first fluid around the exterior of the sealed process chamber. The control signal is further provided to a closed loop heat exchange system, wherein the closed loop heat exchange system modulates flow of a second fluid within an interior cavity of the sealed process chamber based on the control signal. The control signal is still further provided to an open loop heat exchange system, wherein the open loop heat exchange system modulates flow of a third fluid within the interior of cavity of the sealed process chamber.