Metal hexaboride cold field emitter, method of fabricating same, and electron gun
US8952605B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 26, 2013 |
| Grant date | Feb 10, 2015 |
| Priority date | — |
| Expiry date | Jun 26, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/06341
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A metal hexaboride nanowire such as LaB6 with the formed metal-terminated (100) plane at the tip has a small work function, and can emit a very narrow electron beam from the (100) plane. In such emitters, contamination occurs in a very short time period, and the output current greatly decreases when used under low temperature. The cold field emitter of the present invention overcomes this problem with a stabilization process that exposes the metal-terminated (100) plane of the tip to hydrogen at low temperature, and can stably operate over extended time periods.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.