Patent · US Active

Rotation rate sensor

US8955380B2 · kind B2 · utility

0Cited by

1References

3Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Mirko Hattass · Stuttgart, DE
Benjamin Schmidt · Stuttgart, DE

Key dates

Filing date	Sep 16, 2011
Grant date	Feb 17, 2015
Priority date	—
Expiry date	Sep 14, 2032

Classification

Technology area (CPC G)Physics
CPC primaryG01C25/00
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A micromechanical rotation rate sensor, in particular for use in motor vehicles, includes a substrate, at least one seismic mass, which is arranged in a sprung manner on the substrate, drive means for production of a periodic movement of the seismic mass, force detection means for detection of a Coriolis force, which acts on the seismic mass as a result of rotation about a rotation axis which is at right angles to the excitation direction, and measurement means, wherein the measurement means are designed for measurement of structural deviations of the rotation rate sensor.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.