Nano-tip spacers for precise gap control and thermal isolation in MEMS structures
US8957378B2 · kind B2 · utility
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24Claims
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Key dates
| Filing date | Jun 18, 2012 |
| Grant date | Feb 17, 2015 |
| Priority date | — |
| Expiry date | Sep 29, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J5/22
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A THz radiation detector comprising a vertical antenna separated from a suspended platform by an isolating thermal air gap for concentrating THz radiation energy into a smaller suspended MEMS platform upon which a thermal sensor element is located. THz photon energy is converted into electrical energy via a thermally isolated air gap between plates of a coupling capacitor separated by a plurality of nano-tip spacers that determine the gap distance. The capacitor couples energy from the antenna to the thermal sensor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.