Micro contact probe coated with nanostructure and method for manufacturing the same
US8957690B2 · kind B2 · utility
2Cited by
2References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 19, 2009 |
| Grant date | Feb 17, 2015 |
| Priority date | — |
| Expiry date | Aug 6, 2030 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49155
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention relates to a micro contact probe used for a probe card. An exemplary embodiment of the present invention provides a micro contact probe including a coating layer of a nanostructure such as carbon nanotubes formed on a surface thereof to reduce contact resistance when contacting a semiconductor chip. According to the micro contact probe of which the surface is coated with the nanostructure, contact resistance between the probe and the semiconductor chip is lowered and the high frequency characteristics are improved, such that a more accurate measurement can be obtained.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.