Illumination system for detecting the defect in a transparent substrate and a detection system including the same
US8958063B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 31, 2011 |
| Grant date | Feb 17, 2015 |
| Priority date | — |
| Expiry date | Dec 31, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/105
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An illumination device for providing near isotropic illumination, and particularly an illumination system for detecting the defect in a transparent substrate and a detection system including the same are presented. An illumination system includes: an illumination system for detecting the defect in a transparent substrate, including light source receptacle in bar shape; first spot light sources, each emitting a respective first light, the respective first lights being substantially parallel to each other and the first spot light sources being arranged to a first line of spot light sources along the longitudinal direction of the receptacle; and second spot light sources, each emitting a respective second light, the respective second lights being substantially parallel to each other and the second spot light sources being arranged to a second line of spot light sources along the longitudinal direction of the receptacle.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.