Multi-layer variable micro structure for sensing substance
US8958070B2 · kind B2 · utility
9Cited by
17References
25Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 11, 2011 |
| Grant date | Feb 17, 2015 |
| Priority date | — |
| Expiry date | Apr 28, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10H20/85
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An optical sensor includes a substrate having an upper surface, a plurality of protrusions on the substrate, wherein each of the plurality of protrusions is defined by a base at the upper surface of the substrate and by one or more sloped surfaces oriented at oblique angles relative to the upper surface, and two or more structural layers in the sloped surfaces. The surfaces of the two or more structural layers can adsorb molecules of a chemical or biological substance.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.