Vertically integrated 3-axis MEMS angular accelerometer with integrated electronics
US8960002B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 28, 2011 |
| Grant date | Feb 24, 2015 |
| Priority date | — |
| Expiry date | Jul 24, 2033 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB60R2021/01327
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Sensors for measuring angular acceleration about three mutually orthogonal axes, X, Y, Z or about the combination of these axes are disclosed. The sensor comprises a sensor subassembly. The sensor subassembly further comprises a base which is substantially parallel to the X-Y sensing plane; a proof mass disposed in the X-Y sensing plane and constrained to rotate substantially about the X, and/or Y, and/or Z, by at least one linkage and is responsive to angular accelerations about the X, and/or Y, and/or Z directions. Finally, the sensor includes at least one electrode at the base plate or perpendicular to the base plate and at least one transducer for each sensing direction of the sensor subassembly responsive to the angular acceleration. Multi-axis detection is enabled by adjusting a configuration of flexures and electrodes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.