Method and device for plasma treating workpieces

US8961688B2 · kind B2 · utility

Assignee

• KHS CORPOPLAST GMBH · DE

Inventors

• Michael Lizenberg · Geesthacht, DE
• Frank Lewin · Tangstedt, DE
• Hartwig Muller · Plaisir, FR
• Klaus Vogel · Gondelsheim, DE
• Gregor Arnold · Bodenheim, DE
• Stephan Behle · Gau-Odernheim, DE
• Andreas Luttringhaus-Henkel · Darmstadt, DE
• Matthias Bicker · Mainz, DE
• Jurgen Klein · Essen, DE
• Marten Walther · Engelstadt, DE

Key dates

• Filing date: May 9, 2003
• Grant date: Feb 24, 2015
• Expiry date: Jun 9, 2027

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C08J2300/14
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

Disclosed are a method and a device for plasma treating workpieces (5). Said workpiece is inserted into a chamber (7) of a treatment station (3), which can be at least partly evacuated, and is positioned within the treatment station by means of a holding element. In order to simultaneously supply at least two chambers with at least one operating means, a flow of the operating means is branched at least once so as to form at least two partial flows (55).