Tooling carrier for inline coating machine, method of operating thereof and process of coating a substrate

US8961690B2 · kind B2 · utility

Assignee

• Applied Materials GmbH & Co. KG · DE

Inventors

• Uwe Hoffmann · Leverkusen, DE
• Jose Manuel DIEGUEZ-CAMPO · Hanau, DE

Key dates

• Filing date: May 10, 2011
• Grant date: Feb 24, 2015
• Expiry date: Feb 18, 2033

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C23C14/12
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

A process of coating at least one substrate with a plurality of deposition sources, a method of tooling, a carrier unit and a deposition system are described. The systems and methods provide for or allow for exposing a first substrate portion 112a of said at least one substrate 112 to a first deposition source 118a through an aperture 122 of a carrier unit 110, 510, depositing a first layer 126a over the first substrate portion, said first layer including material from said first deposition source, varying a relative position between said at least one substrate and said aperture for exposing a second substrate portion of said at least one substrate, or another substrate, to a second deposition source, and depositing a second layer 126b over the second substrate portion 112b, said second layer including material from said second deposition source.