Patent · US Active

Micromechanical solid-electrolyte sensor device and corresponding production method

US8961760B2 · kind B2 · utility

1Cited by
3References
11Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 22, 2013
Grant dateFeb 24, 2015
Priority date
Expiry dateFeb 10, 2033

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01N27/4141
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A micromechanical solid-electrolyte sensor device includes a micromechanical carrier substrate having a front side and a back side. The micromechanical solid-electrolyte sensor device also includes a first porous electrode and a second porous electrode. The micromechanical solid-electrolyte sensor device also includes a solid-electrolyte embedded between the first porous electrode and the second porous electrode.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.