Micromechanical solid-electrolyte sensor device and corresponding production method
US8961760B2 · kind B2 · utility
1Cited by
3References
11Claims
0Family size
Assignee
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Key dates
| Filing date | Jan 22, 2013 |
| Grant date | Feb 24, 2015 |
| Priority date | — |
| Expiry date | Feb 10, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/4141
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A micromechanical solid-electrolyte sensor device includes a micromechanical carrier substrate having a front side and a back side. The micromechanical solid-electrolyte sensor device also includes a first porous electrode and a second porous electrode. The micromechanical solid-electrolyte sensor device also includes a solid-electrolyte embedded between the first porous electrode and the second porous electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.