Patent · US Active

Chemical sensor with sidewall spacer sensor surface

US8963216B2 · kind B2 · utility

67Cited by

253References

10Claims

0Family size

Assignee

Life Technologies Corporation · US

Inventors

Keith G. Fife · Palo Alto, US
James Bustillo · Castro Valley, US
Jordan Owens · Austin, US

Key dates

Filing date	Mar 13, 2013
Grant date	Feb 24, 2015
Priority date	—
Expiry date	May 11, 2033

Classification

Technology area (CPC G)Physics
CPC primaryG01N27/4145
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

In one implementation, a chemical sensor is described. The chemical sensor includes chemically-sensitive field effect transistor including a floating gate conductor having an upper surface. A dielectric material defines an opening extending to the upper surface of the floating gate conductor. A conductive sidewall spacer is on a sidewall of the opening and contacts the upper surface of the floating gate conductor.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.