Patent · US Active

Control device for a micromirror, method for controlling a micromirror and image projection system

US8963898B2 · kind B2 · utility

1Cited by
8References
9Claims
0Family size

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Inventors

Key dates

Filing dateAug 3, 2012
Grant dateFeb 24, 2015
Priority date
Expiry dateFeb 18, 2033

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02B26/101
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A method for controlling a micro-mirror, having the following: generating a first control signal which encodes a tilting motion of the micro-mirror about a first tilt axis, at a first frequency; generating a second control signal which encodes a tilting motion of the micro-mirror about a second tilt axis which is perpendicular to the first tilt axis, at a second frequency which is lower than the first frequency; modulating the second control signal by binary modulation of the second control signal, at the first frequency; and controlling force coupling elements of the micro-mirror, using the modulated second control signal and the first control signal.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.