Automatic calibration adjustment of capacitance diaphragm gauges to compensate for errors due to changes in atmospheric pressure
US8965725B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 31, 2013 |
| Grant date | Feb 24, 2015 |
| Priority date | — |
| Expiry date | Dec 31, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L27/005
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In order to mitigate the negative effects of a change in atmospheric pressure, an improved capacitance diaphragm gauge (CDG) sensor incorporates an independent ambient atmospheric pressure sensor near the CDG sensor body. The ambient atmospheric sensor is located outside the CDG sensor body to sense the ambient atmospheric pressure surrounding the CDG sensor body. The ambient atmospheric sensor provides an output that represents the ambient atmospheric pressure. A sensor output processing circuit receives the output of the ambient atmospheric sensor as well as the output of the CDG sensor. The processing circuit utilizes the output from the ambient atmospheric pressure sensor to fine tune the CDG measurement of pressure by executing an in situ, real time, automatic calibration adjustment of the CDG.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.