MEMS devices exhibiting linear characteristics
US8966990B2 · kind B2 · utility
3Cited by
4References
22Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Feb 10, 2012 |
| Grant date | Mar 3, 2015 |
| Priority date | — |
| Expiry date | Sep 28, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P15/125
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A micro electro mechanical system device has a first subassembly having sensor element including a coupler, and a second subassembly including a comb drive. The comb drive having stator plates and rotor plates and the coupler configured to displace the rotor plates relative to the stator plates providing a variable capacitance dependent on the displacement of the rotor plate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.