Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same
US8968829B2 · kind B2 · utility
2Cited by
47References
17Claims
0Family size
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Key dates
| Filing date | Aug 24, 2010 |
| Grant date | Mar 3, 2015 |
| Priority date | — |
| Expiry date | Dec 10, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K71/166
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A thin film deposition apparatus that can be applied to manufacture large-sized display devices on a mass scale and that improves manufacturing yield, and a method of manufacturing an organic light-emitting display device by using the thin film deposition apparatus.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.