Microchannel plate detector and methods for their fabrication
US8969823B2 · kind B2 · utility
11Cited by
25References
8Claims
0Family size
Assignee
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Key dates
| Filing date | Jan 21, 2011 |
| Grant date | Mar 3, 2015 |
| Priority date | — |
| Expiry date | Jun 12, 2031 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/45555
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A multi-component tunable resistive coating and methods of depositing the coating on the surfaces of a microchannel plate (MCP) detector. The resistive coating composed of a plurality of alternating layers of a metal oxide resistive component layer and a conductive component layer composed of at least one of a metal, a metal nitride and a metal sulfide. The coating may further include an emissive layer configured to produce a secondary electron emission in response to a particle interacting with the MCP and a neutron-absorbing layer configured to respond to a neutron interacting with the MCP.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.