Patent · US Active

Stacked packages having through hole vias

US8970025B2 · kind B2 · utility

2Cited by
6References
9Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 16, 2014
Grant dateMar 3, 2015
Priority date
Expiry dateMay 16, 2034

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/181
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

Provided is a method of forming a package-on-package. An encapsulation is formed to cover a wafer using a wafer level molding process. The wafer includes a plurality of semiconductor chips and a plurality of through silicon vias (TSVs) passing through the semiconductor chips. The encapsulant may have openings aligned with the TSVs. The encapsulant and the semiconductor chips are divided to form a plurality of semiconductor packages. Another semiconductor package is stacked on one selected from the semiconductor packages. The other semiconductor package is electrically connected to the TSVs.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.