Piezoelectric actuator including X-graded TiOX adhesive layer and its manufacturing method
US8970095B2 · kind B2 · utility
1Cited by
7References
8Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Feb 17, 2012 |
| Grant date | Mar 3, 2015 |
| Priority date | — |
| Expiry date | Aug 14, 2033 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/42
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
In a piezoelectric actuator including a substrate, an insulating layer formed on the substrate, an adhesive layer formed on the insulating layer, a Pt lower electrode layer formed on the adhesive layer, and a PZT piezoelectric layer formed on the Pt lower electrode layer, the adhesive layer is made of TiOx having a composition x which is graded so that the composition x on the side of thio insulating layer is larger than the composition x on the side of the Pt lower electrode layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.