Method and system of detecting tilt angle of object surface and method and system of compensating the same
US8970833B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 12, 2013 |
| Grant date | Mar 3, 2015 |
| Priority date | — |
| Expiry date | Jul 4, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B21/045
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method and a system of detecting a tilt angle of an object surface and a method and a system of compensating the same are provided. The detecting method includes the following steps. Light beams are projected by a light source device to the object surface. An image of the object surface is captured so as to obtain light spots on the object surface. A focus program is executed by adjusting a vertical distance between the light source device and the object surface, so as to gather the light spots in a focal point on the object surface. The vertical distance is adjusted, and a correction angle between the light beams and the object surface is calculated according to the light spots.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.