Optical image measuring device
US8970847B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Dec 9, 2009 |
| Grant date | Mar 3, 2015 |
| Priority date | — |
| Expiry date | Dec 16, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/4795
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An optical image measuring device includes: an optical system that generates and detects interference light; an image forming part that forms a tomographic image based on the detection; an alignment part that performs alignment of the optical system with respect to an object; a focusing part that focuses the optical system with respect to the region of interest; a determining part that determines the suitability of the position of the optical system by the alignment part, the suitability of the focus state by the focusing part, and the suitability of the position of the tomographic image in a frame; a control part that, when it is determined that all of the positions of the optical system, position of focus state and the position in said frame are appropriate, controls the optical system and the image forming part, making it possible to obtain the tomographic image of the region of interest.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.