Gas discriminating semiconductor sensors
US8972204B2 · kind B2 · utility
2Cited by
2References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 1, 2011 |
| Grant date | Mar 3, 2015 |
| Priority date | — |
| Expiry date | Apr 20, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/404
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Sensing particular gases in a mixture uses precise modulated heating. Sensor relative responses are compared at different temperatures and compared with known relative responses to identify gases and concentrations. Heater current sensors provide feedback control and microprocessor inputs. A processor controls complex impedances and varied frequencies in the sensors. Sensor responses at varied complex impedances and at varied frequencies are compared with known responses at those impedances and frequencies to determine existence and concentration of particular gases. Heater and sensor buses are separate or combined.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.