Metal-on-metal capacitor with diagonal feedline
US8976506B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Sep 14, 2009 |
| Grant date | Mar 10, 2015 |
| Priority date | — |
| Expiry date | Sep 15, 2029 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D89/10
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A design for an improved metal-on-metal capacitor design is described. The design includes a substantially diagonal feedline (411, 412, 413) in each metal layer. Each metal layer (21, 22, 23) comprises two sets of metal fingers which are interleaved. Each set of fingers comprises two subsets of fingers and the subsets of fingers are arranged at right angles to each other. Fingers in a first of the two sets are all connected to the diagonal feedline, while fingers in the other set are connected together via fingers at the periphery of the device. The design is repeated in adjacent layers, where the design may be identical or rotated (e.g by 180°) between adjacent metal layers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.