Method for spatially modulating X-ray pulses using MEMS-based X-ray optics
US8976933B2 · kind B2 · utility
1Cited by
2References
18Claims
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Key dates
| Filing date | Sep 27, 2011 |
| Grant date | Mar 10, 2015 |
| Priority date | — |
| Expiry date | Dec 27, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG21K1/067
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A method and apparatus are provided for spatially modulating X-rays or X-ray pulses using microelectromechanical systems (MEMS) based X-ray optics. A torsionally-oscillating MEMS micromirror and a method of leveraging the grazing-angle reflection property are provided to modulate X-ray pulses with a high-degree of controllability.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.