Method for producing an optical window device for a MEMS device
US8981500B2 · kind B2 · utility
1Cited by
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10Claims
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Key dates
| Filing date | Apr 25, 2013 |
| Grant date | Mar 17, 2015 |
| Priority date | — |
| Expiry date | Apr 25, 2033 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2203/0384
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A method for producing an optical window device for a MEMS device, including applying a layer made of a transparent material onto a substrate having a recess, and deforming the layer so that it is folded and the deformed area of the layer forms an optical window.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.