Piezoelectric device with electrode films and electroconductive oxide film
US8981627B2 · kind B2 · utility
23Cited by
9References
18Claims
0Family size
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Key dates
| Filing date | Jun 4, 2012 |
| Grant date | Mar 17, 2015 |
| Priority date | — |
| Expiry date | Jul 10, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/877
Abstract
A piezoelectric device has a first electrode film, a piezoelectric film provided on the first electrode film, and a second electrode film provided on the piezoelectric film. At least one of the pair of electrode films is composed of an alloy, and a major component of the alloy is a metal selected from the group consisting of Ti, Al, Mg, and Zn.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.