Microelectromechanical system with balanced center of mass
US8982440B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | May 12, 2011 |
| Grant date | Mar 17, 2015 |
| Priority date | — |
| Expiry date | Feb 5, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02N1/008
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
MEMS and fabrication techniques for positioning the center of mass of released structures in MEMS are provided. A MEMS device includes a substrate and a released structure connected to the substrate via a flexure. The released structure includes a frame rotatable with respect to the substrate, and an elongate first member having a longitudinal axis extending perpendicularly from an undersurface of the frame and a free end remote from the frame. A recess is formed in an end face of the free end. The recess has a longitudinal axis substantially parallel to the longitudinal axis of the first member and a transverse area smaller than an area of the end face.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.