Probes for multidimensional nanospectroscopic imaging and methods of fabrication thereof
US8984661B2 · kind B2 · utility
1Cited by
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20Claims
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Key dates
| Filing date | Sep 20, 2013 |
| Grant date | Mar 17, 2015 |
| Priority date | — |
| Expiry date | Sep 20, 2033 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB82Y35/00
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
This disclosure provides systems, methods, and apparatus related to probes for multidimensional nanospectroscopic imaging. In one aspect, a method includes providing a transparent tip comprising a dielectric material. A four-sided pyramidal-shaped structure is formed at an apex of the transparent tip using a focused ion beam. Metal layers are deposited over two opposing sides of the four-sided pyramidal-shaped structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.