Patent · US Active

Probes for multidimensional nanospectroscopic imaging and methods of fabrication thereof

US8984661B2 · kind B2 · utility

1Cited by
0References
20Claims
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Key dates

Filing dateSep 20, 2013
Grant dateMar 17, 2015
Priority date
Expiry dateSep 20, 2033

Classification

  • Technology area (CPC B)Performing Operations; Transporting
  • CPC primaryB82Y35/00
  • WIPO fieldMicro-structural and nano-technology
  • WIPO sectorChemistry

Abstract

This disclosure provides systems, methods, and apparatus related to probes for multidimensional nanospectroscopic imaging. In one aspect, a method includes providing a transparent tip comprising a dielectric material. A four-sided pyramidal-shaped structure is formed at an apex of the transparent tip using a focused ion beam. Metal layers are deposited over two opposing sides of the four-sided pyramidal-shaped structure.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.