Parallel slider device with a pneumatic linear guide, control method therefor and measuring device using same
US8984971B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 10, 2010 |
| Grant date | Mar 24, 2015 |
| Priority date | — |
| Expiry date | Jan 28, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B21/08
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
In a parallel slider device with a pneumatic linear guide, the stiffness of the mechanical coupling and the air bearing stiffness are prevented from interfering each other such that the parallelism between the two sliders can be maintained at a high precision in a highly reproducible manner. A difference in the slider support stiffness (air bearing stiffness) between a first pneumatic linear guide and a second pneumatic linear guide by varying the sizes of the air gaps and the supply air pressures so that any error in the linearity is accommodated by the changes in the air gap on the side of the linear guide having a lower slider support stiffness in a stable manner.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.