Coating device and coating method

US8986452B2 · kind B2 · utility

Assignee

• Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE

Inventors

• Tino Harig · Langelsheim, DE
• Markus Höfer · Gardessen, DE
• Artur Laukart · Aalen, DE
• Lothar Schäfer · Meine, DE
• Markus Armgardt · Braunschweig, DE

Key dates

• Filing date: May 13, 2010
• Grant date: Mar 24, 2015
• Expiry date: Jun 20, 2032

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C23C16/28
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

A coating installation containing at least one recipient which can be evacuated and which is adapted to accommodate a substrate, at least one gas supply device which is used to introduce at least one gaseous precursor into the recipient and at least one heatable activation element which has a definable longitudinal extension and which is fastened by means of at least one associated mechanical fastening device to be virtually immobile relative to the recipient. In a corresponding method, an electric current can be supplied to the activation element via at least two contact elements and at least one of the contact elements is designed to contact the activation element in alternating contact points.