Patent · US Active

Method for the production of three-dimensional microstructures

US8986563B2 · kind B2 · utility

3Cited by

2References

13Claims

0Family size

Assignee

Nanoscribe Holding GmbH · DE

Inventors

Michael Thiel · Karlsruhe, DE
Martin Hermatschweiler · Karlsruhe, DE

Key dates

Filing date	Jun 22, 2012
Grant date	Mar 24, 2015
Priority date	—
Expiry date	Dec 29, 2032

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81C2201/0187
WIPO fieldOther special machines
WIPO sectorMechanical engineering

Abstract

A method for producing three-dimensional microstructures in which a source material is applied on a substrate, with a property changing by exposure with electromagnetic radiation. A three-dimensional source structure is written via spatially-resolving exposure in the source material, the source material is removed except for the source structure, and the source structure is molded with a target material, from which the microstructure to be produced is made. Here, a shell structure is provided surrounding the microstructure to be produced, with the source structure being created as the shell structure or the shell structure is produced using the source structure, and subsequently the target material is inserted into the shell structure.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.