Patent · US Active

Aqueous base-developable negative-tone films based on functionalized norbornene polymers

US8986923B2 · kind B2 · utility

1Cited by
7References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 10, 2013
Grant dateMar 24, 2015
Priority date
Expiry dateNov 7, 2033

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10S430/106
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

Embodiments in accordance with the present invention encompass negative-tone, aqueous base developable, self-imagable polymer compositions useful for forming films that can be patterned to create structures for microelectronic devices, microelectronic packaging, microelectromechanical systems, optoelectronic devices and displays.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.