Device and method for manufacturing a particulate filter with regularly spaced micropores
US8987688B2 · kind B2 · utility
0Cited by
19References
24Claims
0Family size
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Key dates
| Filing date | Mar 13, 2008 |
| Grant date | Mar 24, 2015 |
| Priority date | — |
| Expiry date | Sep 8, 2028 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01D2325/028
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
Various embodiments disclose devices and methods for fabricating microporous particulate filters with regularly spaced pores wherein sheet membrane substrates are exposed to energetic particle radiation through a mask and the damaged regions removed in a suitable developer. The required depth of field is achieved by using energetic particles to minimize diffraction and an energetic particle source with suitably small diameter.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.