Position-measuring device

US8988691B2 · kind B2 · utility

Assignee

• DR. JOHANNES HEIDENHAIN GMBH · DE

Inventors

• Ralf Bihr · Traunstein, DE
• Joerg Drescher · Riedering, DE
• Wolfgang Holzapfel · Obing, DE
• Markus Meissner · Teupitz, DE
• Bernhard Musch · Otterfing, DE
• Bernhard Pletschacher · Chieming, DE

Key dates

• Filing date: Jun 17, 2013
• Grant date: Mar 24, 2015
• Expiry date: Jun 17, 2033

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/70775
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A position-measuring device is used to detect the relative position of two machine components that are disposed in a manner allowing movement relative to each other at least along a first and a second main direction of motion in a displacement plane. The device includes at least one measuring standard, which is mounted on a first machine component. At least six scanning units are mounted on a second machine component, and are used for the optical scanning of the measuring standard in at least two measuring directions in the displacement plane. At least two scanning units are assigned to each measuring direction. The scanning units of each respective measuring direction in the displacement plane are disposed non-centrosymmetrically in relation to a center of the second machine component.