Method for manufacturing a magnetic write pole with a consistent bevel angle
US8988824B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 23, 2013 |
| Grant date | Mar 24, 2015 |
| Priority date | — |
| Expiry date | Dec 23, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11B5/235
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A method for manufacturing a magnetic write head that has improved write poled uniformity and bevel angle control. The method uses a damascene process to form the write pole, wherein a trench is formed in a RIEable fill layer, and an adhesion layer is located only in areas outside of the trench. A seed layer is deposited into the trench, followed by a non-magnetic gap layer followed by electroplating of a magnetic material. A chemical mechanical polishing process is then performed, thereby forming a magnetic write pole within the trench. The adhesion layer located outside of the trench prevents de-lamination during the chemical mechanical polishing. However, not having any adhesion layer in the trench prevent oxidation related waviness or other deformation of the sides of the write pole.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.