Patent · US Active

Multi-inlet vacuum pump

US8992162B2 · kind B2 · utility

1Cited by

7References

11Claims

0Family size

Assignee

OERLIKON LEYBOLD VACCUM GMBH · DE

Inventors

Markus Henry · Cologne, DE
Heinz Englaender · Linnich, DE
Christian Beyer · Freiberg, DE

Key dates

Filing date	Mar 3, 2010
Grant date	Mar 31, 2015
Priority date	—
Expiry date	Jul 13, 2032

Classification

Technology area (CPC F)Mechanical Engineering; Lighting; Heating
CPC primaryF05B2250/501
WIPO fieldEngines, pumps, turbines
WIPO sectorMechanical engineering

Abstract

A multi-inlet vacuum pump has a first pump device (10) and a second pump device (12). The first pump device (10) includes a first rotor element (18) having a plurality of first rotor discs (20, 21) arranged consecutively in the delivery direction (36). The second rotor disc includes a second rotor element (26) having a plurality of second rotor discs (28) arranged consecutively in the delivery direction (36). A first fluid flow (34) is suctioned through a main inlet (32) by the first pump device (10) and delivered in the direction of the second pump device (12). A second fluid flow (40) is suctioned through an intermediate inlet (38) by the second pump device and delivered in the direction of a pump outlet. The diameter of the last rotor disc (21) of the first pump (10) substantially corresponds to the diameter of the first rotor (28) of the second pump device (12).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.