Beam imaging sensor
US8993960B2 · kind B2 · utility
0Cited by
14References
111Claims
0Family size
Assignee
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Key dates
| Filing date | Mar 14, 2013 |
| Grant date | Mar 31, 2015 |
| Priority date | — |
| Expiry date | Mar 14, 2033 |
Classification
- Technology area (CPC —)General
Abstract
The present invention relates generally to the field of sensors for beam imaging and, in particular, to a new and useful beam imaging sensor for use in determining, for example, the power density distribution of a beam including, but not limited to, an electron beam or an ion beam. In one embodiment, the beam imaging sensor of the present invention comprises, among other items, a circumferential slit that is either circular, elliptical or polygonal in nature.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.