Patent · US Active

Fin field effect transistor (finFET)

US8994112B2 · kind B2 · utility

10Cited by
0References
14Claims
0Family size

Assignee

Inventors

Key dates

Filing dateSep 10, 2009
Grant dateMar 31, 2015
Priority date
Expiry dateOct 3, 2030

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D30/6213
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A Fin FET whose fin (12) has an upper portion (30) doped with a first conductivity type and a lower portion (32) doped with a second conductivity type, wherein the junction (34) between the upper portion (30) and the lower portion (32) acts as a diode; and the FinFET further comprises: at least one layer (26, 28) of high-k dielectric material (for example Si3N4) adjacent at least one side of the fin (12) for redistributing a potential drop more evenly over the diode, compared to if the at least one layer of high-k dielectric material were not present, when the upper portion (30) is connected to a first potential and the lower portion (32) is connected to a second potential thereby providing the potential drop across the junction (34). Examples of the k value for the high-k dielectric material are k≧5, k≧7.5, and k≧20.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.