Raman spectroscopy using diffractive MEMS
US8994938B2 · kind B2 · utility
2Cited by
11References
14Claims
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Key dates
| Filing date | Jun 1, 2012 |
| Grant date | Mar 31, 2015 |
| Priority date | — |
| Expiry date | Jul 4, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/06113
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A Raman spectrometer including a laser excitation source, edge filters, and detection optics that direct light into a spectrograph. A spectrograph containing a dispersive element and optics that directs various wavelengths of light onto a segmented diffractive MEMS light modulator array. The MEMS array, depending on actuation state, directs light either to or away from a single detector. Control electronics drive the MEMS light modulator for either sequential wavelength measurement or multiplexed wavelength measurement (Hadamard for example).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.